Spatially separated heterodyne grating interferometer for eliminating periodic nonlinear errors
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Precision measurement systems for optical / tactile measurements
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Differential Laser Interferometer
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Precision measurement systems for optical / tactile measurements
A Laser Interferometer-Based Precision Measurement System
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PDF) A tutorial on laser interferometry for precision measurements
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Principle of the polarimetric laser interferometer for a subnanometric... | Download Scientific Diagram
